Evaluation method for delamination strength of micro-sized materials has
been developed using by FEM and measurement of load-displacement curve of
micro-sized specimen. This evaluation method is applied to micro-sized
cylindrical SU-8 specimens on Si substrate. The maximum shear stress between
SU-8 and Si was analyzed with FEM. Fracture load required to delaminate the
two materials was examined using a mechanical testing machine for
micro-sized materials, which have been developed in our group. The
delamination strength was determined from the maximum shear stress and the
fracture load.